A Piezoelectric Two-Degree-of-Freedom Nanopositioner with Parallel Design

• Main Authors: Cheng, Chiao Hua, 鄭喬華
• Other Authors: Hung, Shao-Kang
• Format: Others
• Language: zh-TW
• Published: 2018
• Online Access: http://ndltd.ncl.edu.tw/handle/73z47s

博士 === 國立交通大學 === 機械工程系所 === 106 === This dissertation proposes a parallel design for a piezoelectric 2-degree-of-freedom nano-stepping motor, which performs translation or rotation while its two piezoelectric elements are driven in-phase or out-of-phase electrically. Compared to serial mechanism, parallel design are more compact, stiffer, and have better dynamical characteristics. Experimental results show that this device works stably. The stepping resolution/stroke values of translation and rotation are 100 nm/6 mm and 0.04°/infinite, respectively. Furthermore, flexure springs are designed to improve the operation stability, and a 2-degree-of-freedom motion sensor is integrated to solve the cross-talk problem. Experimental results show that pure translation and rotation can be achieved. The positioning resolution values of translation and rotation are 176 nm and 0.05°, respectively.