The Effect of Hydrogen Concentration on NAND Flash Memory Reliability

碩士 === 國立交通大學 === 電機工程學系 === 106 === In this thesis, we investigate the reliability of two different hydrogen concentration processes. The impacts of hydrogen concentration on interface state density and VT shifts after bake are studied by comparing two different hydrogen concentration. Higher hydro...

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Bibliographic Details
Main Authors: Yang,Jhih-Siang, 楊智翔
Other Authors: Riichiro Shirota
Format: Others
Language:en_US
Published: 2017
Online Access:http://ndltd.ncl.edu.tw/handle/k44gna