The Effect of Hydrogen Concentration on NAND Flash Memory Reliability
碩士 === 國立交通大學 === 電機工程學系 === 106 === In this thesis, we investigate the reliability of two different hydrogen concentration processes. The impacts of hydrogen concentration on interface state density and VT shifts after bake are studied by comparing two different hydrogen concentration. Higher hydro...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2017
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Online Access: | http://ndltd.ncl.edu.tw/handle/k44gna |