Online Automatic Micro-Contamination Monitoring Equipment for Semiconductor Development & business strategy- A case study of N company

• Main Authors: Chiu, Chun-Yu, 邱純玉
• Other Authors: Chung, Hui-Min
• Format: Others
• Language: zh-TW
• Published: 2018
• Online Access: http://ndltd.ncl.edu.tw/handle/4y9sk8

碩士 === 國立交通大學 === 管理學院財務金融學程 === 106 === With continuous breakthroughs and advancements in semiconductor process technology, TSMC began construction of the world’s first flagship factory with a five-nanometer manufacturing process and plan for mass production in 2020. It is expected that it will enter mass production for 3 nanometer volume after four years. Within global competition of yield process, how to improve technology for advanced yield process by monitoring and preventing micro-contamination is an indispensable factor. The yield processing of wafer is, about 300-400 steps, very complicated. How to avoid wafer defects during production process, it is important topic that key players in semiconductor industry must pay attention to, especially to increase the yield rate and utilization rate. Therefore, how to well monitor abnormal yield rate becomes very critical issue. Most of the yield anomalies come from process tools. Some of subtle anomalies from them cannot be detected and discovered immediately by human beings. Thus, we need to use on-line intelligent system equipment to help and support us to establish a comprehensive monitoring and control mechanism. In 2017, the total output value of the semiconductor industry exceeded 400 billion U.S. dollars for the first time. The International Semiconductor Industry Association (SEMI) also estimates that the growth rate of global semiconductor output this year will reach 16%, and it is expected to exceed 500 billion US dollars by 2019. Although the business opportunities are so huge, the self-design and self-made rate of Taiwanese manufacturers' equipment is still low. Components and materials are mainly imported from abroad. With South Korea's strategy of building a supply chain led by Samsung and the China’s strategy of vigorously developing the national team, self-made capabilities to be improved will be major task. How Taiwan’s semiconductor equipment plant responds to and breaks through the situation of low autonomy; In addition, recently the trade war between US and China will put unexpected variables into the future semiconductor industry. This is the most important issue that the government and manufacturers need to face seriously. In this case, N company has invested in semiconductor industry for past ten years for automatic on-line monitoring equipment and also owns a TAF-certified laboratory. To combine with design, R&D, and manufacturing capabilities to do customization, to develop related materials and components, to provide self-produced automation equipment for micro-pollution monitoring. By facing with the pressure of competition from international manufacturers, how to break through and establish self-brand as the goal, how to go international, and also hope to contribute to the future development of the semiconductor industry. Keywords: Semiconductor、Online、Automatic、Micro-Contamination Monitoring、Monitoring Equipment、Business Strategy