Fabrication of Thin-Film Transistors based on ZrAlO Gate Dielectrics and Ti-IGZO Channels by Co-sputtering Processes

碩士 === 國立成功大學 === 微電子工程研究所 === 106

Bibliographic Details
Main Authors: Cheng-XiouLin, 林呈修
Other Authors: Shui-Jinn Wang
Format: Others
Language:zh-TW
Published: 2018
Online Access:http://ndltd.ncl.edu.tw/handle/h8vy6p
Description
Summary:碩士 === 國立成功大學 === 微電子工程研究所 === 106