Investigation of Metal Oxide Thin Films Fabricated by RF Sputtering System and Their Gas Sensing Applications

Investigation of Metal Oxide Thin Films Fabricated by RF Sputtering System and Their Gas Sensing Applications

碩士 === 國立成功大學 === 微電子工程研究所 === 106

Bibliographic Details
Main Authors:	Chia-WeiLee, 李家緯
Other Authors:	Shoou-Jinn Chang
Format:	Others
Language:	en_US
Published:	2018
Online Access:	http://ndltd.ncl.edu.tw/handle/px4f4t

Similar Items

Investigation of Gallium Zinc Oxide Thin Film Fabricated by RF Sputtering System and Their Applications
by: Wan-JuTung, et al.
Published: (2018)

Investigation of Indium Tungsten Oxide Thin Film Fabricated by RF Sputtering System and Their Applications
by: Kuan-YinChen, et al.
Published: (2018)

Investigation of Indium Gallium Oxide Thin Film Fabricated by RF Sputtering System and Their Applications
by: Yu-JuiFang, et al.
Published: (2019)

Investigation of Indium Gallium Oxide Thin Film Fabricated by RF Sputtering System and Their Applications
by: Li-YangChang, et al.
Published: (2017)

Investigation of Zinc Tin Oxide Thin Films and Their Optoelectrical Applications Fabricated by RF Sputtering System
by: Chen-ChuanYang, et al.
Published: (2018)

Fabrication of Hydrogenated microcrystalline Silicon Thin Films Using RF Magnetron Sputtering
by: Jia-wei Han, et al.
Published: (2007)

Investigation of Indium Titanium Zinc Oxide Thin Film Transistors Fabricated by RF Sputtering System and Their Optoelectronic Application
by: Wei-TingWu, et al.
Published: (2017)

Investigations of the electrical and optical properties of RF sputtered bismuth oxide thin films
by: Salih, Haydar Mahmoud
Published: (2001)

Fabrication of cation doped zinc oxide thin films by RF magnetron sputtering for thin film solar cell applications
by: Hung-Peng Chang, et al.
Published: (2011)

Preparaiton and characterisation of RF-sputtered bismuth oxide thin films
by: Tovey, Lois Sara
Published: (1989)

Electrical properties of R.F. sputtered thin oxide films
by: Hilou, H. W.
Published: (1985)

The Study of Titanium Oxide Thin Film Prepared by RF Sputtering
by: I-Han Wu, et al.
Published: (2008)

Growth of Hydrogen Doped Zinc Oxide Thin Film by RF Magnetron Sputtering
by: Chia-Chun Wang, et al.
Published: (2003)

Investigation of Zinc gallate Thin Film Fabricated by RF Sputtering System and TheirOptoelectronics Applications
by: Cheng-HsunLi, et al.
Published: (2019)

Silicon-Germanium thermoelectric thin films prepared by RF magnetron sputtering and their application on hydrogen gas sensing
by: Kuan-Lin Tung, et al.

Investigation of Gallium Arsenide Thin Films deposited by RF Sputtering
by: Chu-Jian Lin, et al.
Published: (2016)

Gas Sensing Characteristics of Reactive Sputtered Tin Oxide Thin Films Mixed with Titanium
by: Lee Shyue-Lin, et al.
Published: (1999)

Fabrication and Characterization of LSGM Electrolyte Thin Film Deposited by RF Magnetron Sputtering
by: Yi-Xuan Hu, et al.
Published: (2014)

Fabrication and micromagnetic modeling of barium hexaferrite thin films by RF magnetron sputtering
by: Alaaedeen R. Abuzir, et al.
Published: (2018-03-01)

EUROPIUM SILICATE THIN FILMS FABRICATED BY RF MAGNETRON SPUTTERING AND THERMAL TREATMENT
by: Young Chul Shin, et al.
Published: (2017-11-01)

Fabrication and Properties od Dielectric Thin Films Grown by rf Magnetron Sputtering
by: Tsai, Pei-Yuan, et al.
Published: (1996)

Fabrication of LiNbO3 thin film by RF magnetron sputtering
by: Wen-Cheng Sung, et al.
Published: (2009)

Fabrication of the Multi-doping ZnO Thin Films by RF Magnetron Sputtering
by: Yu-jing Liao, et al.
Published: (2012)

FeSeTe superconducting thin film fabricated by RF Sputter System
by: Shih-I Hsu, et al.
Published: (2013)

Sputter-Deposited Indium–Tin Oxide Thin Films for Acetaldehyde Gas Sensing
by: Umut Cindemir, et al.
Published: (2016-04-01)

Studies on the Structure and Gas Sensing Properties of SnO2：Mo Thin Films Produced by RF Sputtering
by: Chih-Wu Hung, et al.
Published: (2009)

Effects of gas flow rate on the structure and elemental composition of tin oxide thin films deposited by RF sputtering
by: Muntaser Al-Mansoori, et al.
Published: (2017-12-01)

Fabrication and characterization of niobium-doped bismuth oxide thin electrolyte deposited by RF magnetron Sputtering
by: Yu-Chia Huang, et al.
Published: (2010)

Study on the fabrication of zinc oxide doped aluminum thin films by RF sputtering and the crystal growth structure of perovskite
by: YING-HAN CHEN, et al.
Published: (2017)

Fabrication and Characterization of Yttria Stabilized Zirconia Oxide SOFC Electrolytes Thin Film Deposited by RF Magnetron Sputtering
by: Wei-Ting Hsu, et al.
Published: (2012)

Investigating optical properties of ITO thin film grown by RF sputtering
by: Abd. Mubin, M. Helmi, et al.
Published: (2017)

Investigation of ZTO thin film by RF co-sputter and it’s application
by: Po-JuiKuo, et al.
Published: (2013)

The Potential of Reactively RF Sputtered ZnO Thin Films for the Fabrication of Microwave Filters
by: A. T. Kollias, et al.
Published: (2000-01-01)

Study on Diamond-Like Carbon Thin Films Fabricated by RF Magnetron Sputtering Deposition
by: Wei-HaoChang, et al.
Published: (2016)

GLAD Magnetron Sputtered Ultra-Thin Copper Oxide Films for Gas-Sensing Application
by: Artur Rydosz, et al.
Published: (2020-04-01)

Characterization of Zinc Oxide Thin Films Prepared by Liquid Phase Deposition and RF Sputtering
by: Jung-Chun Lee, et al.
Published: (2008)

Study of Magnesium Oxide as Insulating Dielectric Thin Film by RF Magnetron Sputter
by: Chiu, Chien-Ta, et al.
Published: (2016)

Study of Structural and Sensing Properties of Tungsten Trioxide Thin Films Deposited By RF Sputtering
by: Vallejos Vargas, Stella
Published: (2008)

THE FABRICATION OF SnO2 THIN FILMS ON ZNO/CORNING 7059 GLASS BY RF MAGNETRON SPUTTERING FOR HUMIDITY SENSING APPLICATIONS
by: Nien-Po Sheng, et al.
Published: (1999)

Fabrication of oriented hydroxyapatite film by RF magnetron sputtering
by: Keishiro Hirata, et al.
Published: (2017-08-01)

Cannot write session to /tmp/vufind_sessions/sess_9beuflmh1kdovjdq1kdenij3gm