Investigation of Metal Oxide Thin Films Fabricated by RF Sputtering System and Their Gas Sensing Applications
碩士 === 國立成功大學 === 微電子工程研究所 === 106
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| Language: | en_US |
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2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/px4f4t |
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ndltd-TW-106NCKU5428028 |
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ndltd-TW-106NCKU54280282019-05-16T01:07:59Z http://ndltd.ncl.edu.tw/handle/px4f4t Investigation of Metal Oxide Thin Films Fabricated by RF Sputtering System and Their Gas Sensing Applications 以磁控濺鍍法製作之金屬氧化物薄膜特性及其氣體感測之應用 Chia-WeiLee 李家緯 碩士 國立成功大學 微電子工程研究所 106 Shoou-Jinn Chang Jone-Fang Chen 張守進 陳志方 2018 學位論文 ; thesis 77 en_US |
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NDLTD |
| language |
en_US |
| format |
Others
|
| sources |
NDLTD |
| description |
碩士 === 國立成功大學 === 微電子工程研究所 === 106 |
| author2 |
Shoou-Jinn Chang |
| author_facet |
Shoou-Jinn Chang Chia-WeiLee 李家緯 |
| author |
Chia-WeiLee 李家緯 |
| spellingShingle |
Chia-WeiLee 李家緯 Investigation of Metal Oxide Thin Films Fabricated by RF Sputtering System and Their Gas Sensing Applications |
| author_sort |
Chia-WeiLee |
| title |
Investigation of Metal Oxide Thin Films Fabricated by RF Sputtering System and Their Gas Sensing Applications |
| title_short |
Investigation of Metal Oxide Thin Films Fabricated by RF Sputtering System and Their Gas Sensing Applications |
| title_full |
Investigation of Metal Oxide Thin Films Fabricated by RF Sputtering System and Their Gas Sensing Applications |
| title_fullStr |
Investigation of Metal Oxide Thin Films Fabricated by RF Sputtering System and Their Gas Sensing Applications |
| title_full_unstemmed |
Investigation of Metal Oxide Thin Films Fabricated by RF Sputtering System and Their Gas Sensing Applications |
| title_sort |
investigation of metal oxide thin films fabricated by rf sputtering system and their gas sensing applications |
| publishDate |
2018 |
| url |
http://ndltd.ncl.edu.tw/handle/px4f4t |
| work_keys_str_mv |
AT chiaweilee investigationofmetaloxidethinfilmsfabricatedbyrfsputteringsystemandtheirgassensingapplications AT lǐjiāwěi investigationofmetaloxidethinfilmsfabricatedbyrfsputteringsystemandtheirgassensingapplications AT chiaweilee yǐcíkòngjiàndùfǎzhìzuòzhījīnshǔyǎnghuàwùbáomótèxìngjíqíqìtǐgǎncèzhīyīngyòng AT lǐjiāwěi yǐcíkòngjiàndùfǎzhìzuòzhījīnshǔyǎnghuàwùbáomótèxìngjíqíqìtǐgǎncèzhīyīngyòng |
| _version_ |
1719173591887511552 |