Investigation of Metal Oxide Thin Films Fabricated by RF Sputtering System and Their Gas Sensing Applications

碩士 === 國立成功大學 === 微電子工程研究所 === 106

Bibliographic Details
Main Authors: Chia-WeiLee, 李家緯
Other Authors: Shoou-Jinn Chang
Format: Others
Language:en_US
Published: 2018
Online Access:http://ndltd.ncl.edu.tw/handle/px4f4t
Description
Summary:碩士 === 國立成功大學 === 微電子工程研究所 === 106