Enhance Scheduling System to Improve Cost-effective Semiconductor Wafer Standard Clean Acid Usage
碩士 === 國立成功大學 === 工程科學系碩士在職專班 === 106 === Semiconductor manufacturing is a capital and technology intensive industry. In a factory, each machine has its special function in the semiconductor production process, and uses a lot of dangerous chemicals of various kinds. In order to avoid human errors in...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/4n56pm |