Study the high film thickness of Molybdenum-Aluminum structure in Al-acid process
碩士 === 國立成功大學 === 工程科學系碩士在職專班 === 106
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2018
|
Online Access: | http://ndltd.ncl.edu.tw/handle/kk7ha7 |
id |
ndltd-TW-106NCKU5028008 |
---|---|
record_format |
oai_dc |
spelling |
ndltd-TW-106NCKU50280082019-05-16T00:30:06Z http://ndltd.ncl.edu.tw/handle/kk7ha7 Study the high film thickness of Molybdenum-Aluminum structure in Al-acid process 高膜厚鉬鋁結構於鋁酸製程的蝕刻研究 Ming-ChunChen 陳明俊 碩士 國立成功大學 工程科學系碩士在職專班 106 Jung-Hua Chou 周榮華 2018 學位論文 ; thesis 56 zh-TW |
collection |
NDLTD |
language |
zh-TW |
format |
Others
|
sources |
NDLTD |
description |
碩士 === 國立成功大學 === 工程科學系碩士在職專班 === 106 |
author2 |
Jung-Hua Chou |
author_facet |
Jung-Hua Chou Ming-ChunChen 陳明俊 |
author |
Ming-ChunChen 陳明俊 |
spellingShingle |
Ming-ChunChen 陳明俊 Study the high film thickness of Molybdenum-Aluminum structure in Al-acid process |
author_sort |
Ming-ChunChen |
title |
Study the high film thickness of Molybdenum-Aluminum structure in Al-acid process |
title_short |
Study the high film thickness of Molybdenum-Aluminum structure in Al-acid process |
title_full |
Study the high film thickness of Molybdenum-Aluminum structure in Al-acid process |
title_fullStr |
Study the high film thickness of Molybdenum-Aluminum structure in Al-acid process |
title_full_unstemmed |
Study the high film thickness of Molybdenum-Aluminum structure in Al-acid process |
title_sort |
study the high film thickness of molybdenum-aluminum structure in al-acid process |
publishDate |
2018 |
url |
http://ndltd.ncl.edu.tw/handle/kk7ha7 |
work_keys_str_mv |
AT mingchunchen studythehighfilmthicknessofmolybdenumaluminumstructureinalacidprocess AT chénmíngjùn studythehighfilmthicknessofmolybdenumaluminumstructureinalacidprocess AT mingchunchen gāomóhòumùlǚjiégòuyúlǚsuānzhìchéngdeshíkèyánjiū AT chénmíngjùn gāomóhòumùlǚjiégòuyúlǚsuānzhìchéngdeshíkèyánjiū |
_version_ |
1719166415874818048 |