Mg, F co-doped zinc oxide thin films deposited by RF magnetron sputtering and their applicationto silicon thin film solar cells
碩士 === 國立中興大學 === 電機工程學系所 === 106 === ZnO-based transparent conducting thin films prepared by radio frequency (RF) magnetron sputtering have been widely used in various optoelectronic devices. In this study, a magnesium-fluorine co-doped zinc oxide film (MFZO) and a fluorine-doped zinc oxide film (F...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/w3gp7c |