The Micro Flexible Probe Manufacturing Process and Mechanical Properties Research

• Main Authors: CHANG,SSU-WEI, 張思緯
• Other Authors: WANG,HAI
• Format: Others
• Language: zh-TW
• Published: 2018
• Online Access: http://ndltd.ncl.edu.tw/handle/32dmx3

碩士 === 明志科技大學 === 機械工程系機械與機電工程碩士班 === 106 === In this study, micro-flexible probe optimization design, process optimization, characterization and testing methods of successive generations of seniors were extended. At the present time, the research topics of micro-flexible probes of MEMS technology in the previous four generations optimize the design, process improvement, analysis of mechanical properties and burning test into research, application and improvement of the probe burning test equipment and test platform, improved probe mechanical properties test methods and related experimental projects. Before the thesis, the defects on the probe end and the fixed end mask are improved before the research, which makes the MEMS smoothly proceed without damaging the photoresist and improve the flatness of the photoresist model. After electroforming the completed probe Stripping rate; and for MEMS on the experimental parameters and production processes do optimization and improvement. After completion of the MEMS to remove the micro-flexible probe burn test will be carried out to increase the design of the guide sleeve with oval guide hole to guide the probe burning direction, the use of guide bushings to confirm the resulting bias ratio is lower than 0.3%, so ignore the deviation of the test, but because the pilot hole wear are biased toward the probe tip, so the guide sleeve design is divided into two, the test found that the probe outer guide hole wear rate of about 4.081% , While the inner guide hole wear rate of about 1.305%, a difference of 2 to 3 times.