Investigation of Tantalum Oxide Films with Bipolar Pulsed Magnetron Sputter System for the Applications of Electrochromic Devices
碩士 === 國立金門大學 === 電子工程學系碩士班 === 106 === In the electrochromic device, tungsten oxide has good chemical stability and reversibility, and tantalum oxide has good conductivity and chemical stability. In this study, bipolar magnetron controlled pulsed magnetron sputtering method was used to prepare thin...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/4nsr75 |