Preparation of p-Type SnO Semiconductor Thin Films by Reactive DC Magnetron Sputtering and their Application for Thin-Film Transistors
碩士 === 逢甲大學 === 材料科學與工程學系 === 106 === First, the preparation of p-type tin monoxide thin films by reactive DC magnetron sputtering. The electrical properties of the thin films are analyzed by sputtering times and annealing temperatures. Second, the p-type tin monoxide thin films were applied to the...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/9gru2s |