Study on the optimization of dual transparent diffraction grating combination for the in-plane displacement measurement
碩士 === 元智大學 === 光電工程學系 === 105 === In this study, the optimal dual gratings combination was proposed and demonstrated that the high sensitivity, high resolution and low displacement error can be achieved by adopting the combination of the grating scales of 1.6 μm and 1.2 μm, respectively. The experi...
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2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/89155659292379850107 |
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ndltd-TW-105YZU056140142017-09-19T04:29:40Z http://ndltd.ncl.edu.tw/handle/89155659292379850107 Study on the optimization of dual transparent diffraction grating combination for the in-plane displacement measurement 雙穿透式繞射光柵於面內位移量測之研究 Po-Tsen Meng 孟柏辰 孟柏辰 碩士 元智大學 光電工程學系 105 In this study, the optimal dual gratings combination was proposed and demonstrated that the high sensitivity, high resolution and low displacement error can be achieved by adopting the combination of the grating scales of 1.6 μm and 1.2 μm, respectively. The experiment results showed that the displacement difference between comparison method (HP interferometer) and proposed method were within 0.36% and 0.7% for the travel ranges of 40 μm and 0.5μm, respectively. The displacement error of the optimal combination of dual gratings was within 5.37 nm as the measured phase of 360°. Cheng-Chin Hsu 許正治 2017 學位論文 ; thesis 80 zh-TW |
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NDLTD |
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zh-TW |
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Others
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NDLTD |
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碩士 === 元智大學 === 光電工程學系 === 105 === In this study, the optimal dual gratings combination was proposed and demonstrated that the high sensitivity, high resolution and low displacement error can be achieved by adopting the combination of the grating scales of 1.6 μm and 1.2 μm, respectively. The experiment results showed that the displacement difference between comparison method (HP interferometer) and proposed method were within 0.36% and 0.7% for the travel ranges of 40 μm and 0.5μm, respectively. The displacement error of the optimal combination of dual gratings was within 5.37 nm as the measured phase of 360°.
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| author2 |
Cheng-Chin Hsu |
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Cheng-Chin Hsu Po-Tsen Meng 孟柏辰 孟柏辰 |
| author |
Po-Tsen Meng 孟柏辰 孟柏辰 |
| spellingShingle |
Po-Tsen Meng 孟柏辰 孟柏辰 Study on the optimization of dual transparent diffraction grating combination for the in-plane displacement measurement |
| author_sort |
Po-Tsen Meng 孟柏辰 |
| title |
Study on the optimization of dual transparent diffraction grating combination for the in-plane displacement measurement |
| title_short |
Study on the optimization of dual transparent diffraction grating combination for the in-plane displacement measurement |
| title_full |
Study on the optimization of dual transparent diffraction grating combination for the in-plane displacement measurement |
| title_fullStr |
Study on the optimization of dual transparent diffraction grating combination for the in-plane displacement measurement |
| title_full_unstemmed |
Study on the optimization of dual transparent diffraction grating combination for the in-plane displacement measurement |
| title_sort |
study on the optimization of dual transparent diffraction grating combination for the in-plane displacement measurement |
| publishDate |
2017 |
| url |
http://ndltd.ncl.edu.tw/handle/89155659292379850107 |
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