| Summary: | 博士 === 國立臺北科技大學 === 機電科技研究所 === 105 === High-tech process in Taiwan as one of the main economic activities, it had raw materials manufacturing, pre-processing, finished product manufacturing and final treatment supply chain. Each supplier is important in whole supply chain; any disaster will cause the supply interruption to not continue the production, and due to the hazardous source is existed from process to factory facility. So totally preventing the potential hazardous in each process step, the overall consideration to achieve inherently safer purpose should be taken.
The research method is mainly based on the ISD strategy; this study using ISD strategy to develop the application of NAND flash components; using ISD strategy to establish and to verify ISD strategy in furnace temperature distribution model and film thickness model; using ISD strategy application on furnace machinery integrity; using ISD strategy to discuss of lithography process tool delivery and chemical supply system application; using ISD strategy to design pressure sensors and complete the prototype of sensing system; to verify ISD strategy application in the process, facility and safety monitoring system is more safer by the previous study.
Research results in this study; This study used Silane process design was replaced for TEOS and is verified to get more inherently safer level with existing product specifications; The furnace temperature distribution model, it was found that the nominal power could be reduced 44% when turning off 2 heating zones, as well as the rate of capacity utilization the production capacity is 97.7% to reduce the 121.4 KWH power consumption; Then the furnace tube film thickness model is also simulated and experimental verification, its result shows 809.6L Silane reduction under the 27 cylinders (40L high pressure per each cylinder) condition; Key equipment integrity factor in furnace machine checklist generated by this study and top management commitment and training are the key factor to success according to experts’ interview result; This study were used the FMEA and FDS to simulate improve and verify the scanner equipment and the ISD strategy of chemical supply system, the results were in line with the expectation after the process capability check; This study developed a pressure sensor and sensing system prototype using the ISD strategy guideline, the results can still work when the Vout was measured with a vacuum value between 8.71 * 10-2 to 1.27 * 10-4 Torr when the temperature (range is 0 ℃ to 250 ℃ at atmospheric pressure) and humidity (range of 15% to 70%) environmental conditions. This study completed to use ISD strategy to verify the process, facility and safety monitoring system, which is an important contribution to build up a proper application programs /suggestion to high-tech industry safety management for reference to improve the inherently safer level.
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