| Summary: | 碩士 === 國立臺北科技大學 === 材料科學與工程研究所 === 105 === In this study, La0.76Sr0.24Ga0.63Mg0.37O3-δ (LSGM) target was prepared using the solid-state reaction method. The solid oxide fuel cell (SOFC)contains a dense La0.87Sr0.13Ga0.88Mg0.12O3-δ thin films were deposited on NiO-SDC (Sm0.2Ce0.8O2-δ) anode substrate by RF magnetron sputtering and applied to solid oxide fuel cell (SOFC). The crystal structure and microstructure of LSGM electrolyte film were measured and analyzed.
The influence of working atmosphere (mixed air Ar and O2) on RF magnetron sputtering was studied. The dense electrolyte film with a thickness of 4.3 μm, 2.5 μm and 1.6 μm were used at a working pressure of 1 x 10-2 Torr, RF power of 100 W and Ar : O2 atmosphere with ratio of 10 : 0, 8 : 2 and 6 : 4 with total flow rate as 30 sccm. In order to crystallize, the post-deposited LSGM with an atmosphere of Ar : O2 = 10:0, 8 : 2 and 6 : 4 were annealed at 950oC for 4 h, 1100oC for 1 h and 1100oC for 2 h in air, respectively. Finally, a single cell have atmosphere of Ar : O2 = 10 : 0 film electrolyte with open circuit voltage (OCV) and maximum power density (MPD) of 0.861 V and 1.105 W/cm2 at 850oC was composed with LSGM-LSCF cathode, NiO-SDC anode and LSGM electrolyte.
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