| Summary: | 碩士 === 國立臺北科技大學 === 材料科學與工程研究所 === 105 === The melting point of tungsten is the highest in nature, and tungsten has high density, high strength and superior corrosion resistance. So it’s widely used in medical, electronic steel metallurgy and other industries, and high-purity tungsten target is one of the basic materials for the production of integrated circuits. Therefore, how to develop a production of high purity tungsten metal material metallurgical smelting technology is very important. In this study, two melting experiments were carried out by electron beam smelting, and the crystal structure was observed by XRD. The crystal plane of tungsten ingot was mainly (110) plane after long refining. The elemental content was analyzed by inductively coupled plasma mass spectrometry (ICP-MS) with an optimum purity of 7N7. From the metallographic analysis, the average grain area of the tungsten ingot is about 0.554 cm2. From the TEM, the lattice constants of the two ingots were 0.3366 nm and 0.3441 nm, respectively, which were close to the theoretical values.
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