Photovoltaic Performance of Silicon Solar Cells Enhanced by Plasmonic Silver Nanoparticles of Various Dimensions Embedded in TiO2 Antireflection Layer Through Anodic Aluminum Oxide Template

• Main Authors: Ta-Wei Chuang, 莊大緯
• Other Authors: 陳堯輝
• Format: Others
• Language: zh-TW
• Published: 2017
• Online Access: http://ndltd.ncl.edu.tw/handle/ys6827

碩士 === 國立臺北科技大學 === 光電工程系研究所 === 105 === In this study, the photovoltaic performances of plasmonic silicon solar cells are characterized and demonstrated by using metal nanoparticles. The surface plasmon resonance (SPR) of silver nanoparticles (Ag-NPs) was used to enhance photovoltaic performance of silicon solar cells in which Ag-NPs increase the coupling of incident light into silicon due to plasmonic effects. The different dimensions of the regular arrayed Ag-NPs were obtained by the mask of Anodic Aluminum Oxide (AAO) template with different pore dimension. The SPR of Ag-NPs was examined by using Raman spectroscopy and absorption spectrum. Then, a layer of TiO2 was coated upon the surface of Ag-NPs to reach quarter wavelength thick for further studying plasmonic effects, which named a plasmon antireflective coating (PARC). Here, the reflectance of PARC can be enhanced by both antireflection and scattering effects of metallic nanoparticles. A 30-nm thick Ag film was deposited through three different diameter nanopores of AAO templates by e-beam evaporation and subsequently annealed the deposited Ag films to form Ag-NPs on three Si solar cells. The SEM, optical reflectance, external quantum efficiency, dark current-voltage and photovoltaic current-voltage measurements were used to reveal the contribution of plasmonic scattering induced by Ag-NPs of various dimensions. The obtained results indicated that the solar cells with a large dimension Ag-NPs exhibited a superior plasmonic scattering than that of with a smaller dimension Ag-NPs. The short-current density (Jsc) enhancement of 20.28 % (from 26.73 mA/cm2 to 32.15 mA/cm2) and the conversion efficiency (η) enhancement of 18.50 % (from 11.08 % to 13.13 %) are obtained for the cell with a large dimension of Ag-NPs due to plasmonic effects of Ag-NPs, compared to the bare solar cell. Furthermore, when coated a TiO2 antireflective layer on the surface of Ag-NPs, the short-current Jsc enhancement of 30.45 % (from 26.73 mA/cm2 to 34.87 mA/cm2) and the η enhancement of 25.90 % (from 11.08 % to 13.95 %) were obtained due to the combination of plasmonic effects and antireflection.