| Summary: | 碩士 === 國立臺北科技大學 === 化學工程與生物科技系化學工程碩士班（碩士在職專班） === 105 === With the development of flexible electronics industry, the water-vapor barrier in flexible thin film encapsulation can extend the durability of electronic devices. The improvement of the roughness of the polymer substrate before the deposition of metal oxides films is the key factor to successfully fabricate the barrier layer. In this study, PET and PEN are used as two polymer substrates. Poly (acrylic acid) (PAA) were deposited on the substrates by using layer-by-layer (LbL) assembly with various pH conditions. Two metal oxides, ZTO (reactive sputtering Zinc Tin Oxide) and Al2O3 (RF sputtering of alumina) were used as the barrier coatings. The combination of planarization coatings and barrier coatings was fabricated as the dyads film of the organic-inorganic hybrid layer. Optical Microscope (OM), Atomic Force Microscope (AFM), MOCON, and UV-Vis spectrometers were applied to measure the surface morphology, optical properties, and water vapor permeation rate.
The results of OM and AFM show that surface roughness had greatly reduced the roughness after using PEI/PAA coating. The water vapor transmittance rate(WVTR) of the blank PET and blank PEN is 5.55 and 1.88 g/(m2．day), respectively. With the addition of single inorganic layer, the WVTR reduced to 0.1~0.05 g/(m2．day). In this study, the multilayer film of alumina’s optical transmittance and haze properties is better than Zinc Tin Oxide. In barrier performance, both the three dyads of Zinc Tin Oxide and the five dyads of alumina reach detection limit of Mocon (below 5x10-5 g/(m2．day).
In conclusion, cation/anionic coatings make a significant reduction on surface roughness of flexible substrate, promoting deposition inorganic multilayer to the best barrier performance and significant improvement of optical properties.
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