Fabrication and Characterization of Nano-structured MoN Thin Films

• Main Authors: XIANG, JIAN-YING, 向建穎
• Other Authors: WU, FAN-BEAN
• Format: Others
• Language: en_US
• Published: 2017
• Online Access: http://ndltd.ncl.edu.tw/handle/42dmn6

碩士 === 國立聯合大學 === 材料科學工程學系碩士班 === 105 === In this study, the molybdenum nitride, MoN, multilayer coatings modulated by single layer molybdenum nitride with distinguished structure was proposed. The microstructures with crystalline, preferred orientation and featureless structure, respectively, are fabricated by magnetization sputtering with the input power and gas inlet control. Three kinds of multilayer coatings were successfully prepared by stacking of MoN single layer coating of above mentioned three structural features. The structure of the multilayer coatings were controlled at a total of 20 layers and 1 um, while each building layer was 50 nm. Sample M1-2, which is formed by alternately stacking of the crystalline and the preferred orientation structure, exhibits a strong suppression on formation of the preferred orientation, and the columnar crystalline structure is confined to each of the building layers. On the other hand, the continuous columnar crystalline structure are observed in the microstructure of M1-7and M2-7 which are made of crystalline/amorphous, and preferred orientation/amorphous structures, respectively. The atoms in the amorphous layer are easily to grow along the grain in the previous layer. In particular, the continuous columnar crystalline structure with (111) preferred orientation grown through several layers is observed in the M2-7 coating. The multilayers showed excellent adhesion as compared to the single layer coatings. M1-7 exhibited the superior adhesion, strength with almost no peeled coating fragments around the edges of the pit. The tribological behavior of multilayer and single layer was also discussed.