Fabricating bionic compound eye on non-planar substrate by precise micromachining process

• Main Authors: Chung-Ying Lee, 李忠穎
• Other Authors: Pin-Chuan Chen
• Format: Others
• Language: zh-TW
• Published: 2017
• Online Access: http://ndltd.ncl.edu.tw/handle/45j89k

碩士 === 國立臺灣科技大學 === 機械工程系 === 105 === The long-term goal of this research is to develop a novel manufacturing process to create microlens array (MLAS) on non-planar substrates, which can be used as bionic compound eye for applications in the optoelectric or internet-of-things (IOT) fields. Multiple manufacturing processes would be used to crate MLAS in this article, including precision machining, mold insert design, casting technique, and heterogeneous bonding technique between non-planar substrates. This thesis can be separated into two major stages: the goal of the first stage is to fabricate non-planar microchannel on PMMA substrate by using precision machining and non-planar bonding technique. The influence from several parameters were discussed in the first stage, including micromilling tool selection, plan of the cutting path, the backlash from the ball screw, and the approach for bonding non-planar substrates. The second stage of the extension form the first stage, and the goal is to fabricate MLAS on non-planar substrates. The fabrication process included fabrication of top and bottom mold inserts, PDMS casting and demolding from the assembled mold inserts, and heterogeneous bonding between PDMS membrane and hemisphere PMMA substrate. The conclusions from this research are: (1) studying precision machining on non-planar substrates and developing bonding methods for non-planar heterogeneous substrates, which can create disposable non-planar biochips for more application field like wearable devices; (2) this manufacturing approach can create various MLAS in terms of diameters and curvature on the same substrate. With replication technique and electroplating, the metal mold insert for MLAS can be fabricated and used for mass production of disposable MLAS; (3) this manufacturing approach also can be used for creating MLAS on non-planar substrates as bionic compound eye, which is advantageous compared to other reported methods for MLAS.