Synchronized piezo-actuated stage control using Preisach model based on phenomenon linearization

• Main Authors: Guanghao Xu, 徐廣昊
• Other Authors: Jia-Yush Yen
• Format: Others
• Language: en_US
• Published: 2017
• Online Access: http://ndltd.ncl.edu.tw/handle/w5263k

碩士 === 國立臺灣大學 === 機械工程學研究所 === 105 === With high resolution and large bandwidth, piezo-actuator is widely used in precision position control system. However, there is nonlinear effect caused by hysteresis phenomenon between input voltage and displacement of the piezo-actuator which increases the difficulty for control, thus degrades the precision of control result. Besides, dual actuators position difference limits the performance as well. In this thesis, for the sake of enhancing the control performance, the nonlinearity caused by hysteresis phenomenon is compensated, so the system now is a linear mechanic system. Referring to the charge control structure proposed by L.S. Chen et al., it is shown that the relationship between charge flowing through the piezo-actuator and its elongation is linear. Therefore, by measuring the charge flowing through the piezo-actuator, the voltage consumption caused by the hysteresis can be obtained and the hysteresis compensator can be built to compensate the nonlinear effect and then, due to the system can be regarded as a linear mechanic system after being compensated, a tracking controller is designed for positioning. Besides, a cross-coupled controller is designed referring to the hardware structure to fix asynchrony phenomenon under different frequencies on produced by dual-actuators, improves the control results significantly in a simple and rapid pattern. Piezo-actuator’s modeling and analyses, system parameters identification, Preisach model building, cross-coupled controller design method are introduced and discussed in this thesis. For validity, a series of experiments under several frequencies are implemented in this thesis.