Phased-array Development of CMOS-MEMS Zero Bias Capacitive Micro-machined Ultrasonic Transducers for Biomedical Imaging System
碩士 === 國立臺灣大學 === 生醫電子與資訊學研究所 === 105 === In this study, a phased-array of zero-bias CMOS-based Capacitive Micro-machined Ultrasonic Transducers (CMUTs) with high sensitivity is developed. The device is implemented with the TSMC 0.35µm 2P4M CMOS-MEMS process. Based on the previous research at the CM...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/50913308328386437668 |