Growth of Mutli-crystalline Silicon Ingot by Using Reusable Crucible
碩士 === 國立臺灣大學 === 化學工程學研究所 === 105 === Silicon nitride is an alternative material to the widely used silica crucibles for silicon crystal growth, its advantages being the reusability in successive castings and much purier than quartz crucible and reduciton for a source for oxygen contamination of th...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2017
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Online Access: | http://ndltd.ncl.edu.tw/handle/16257944631340545623 |