A Fabrication Approach toward Surface Nanostructures Based on Electrically-Charged Selectivity of Chemical Vapor Deposition
碩士 === 國立臺灣大學 === 化學工程學研究所 === 105 === In this paper, a variety of functional poly-para-xylylene films were inhibited deposition by applying current. The metal patterns of honeycomb were manufactured with process of nanosphere lithography, which removing the polystyrene by tetrahydrofurane(THF) afte...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/zyxr2r |