A Fabrication Approach toward Surface Nanostructures Based on Electrically-Charged Selectivity of Chemical Vapor Deposition

• Main Authors: Hung-Pin Hsieh, 謝洪斌
• Other Authors: Hsien-Yeh Chen
• Format: Others
• Language: zh-TW
• Published: 2017
• Online Access: http://ndltd.ncl.edu.tw/handle/zyxr2r

碩士 === 國立臺灣大學 === 化學工程學研究所 === 105 === In this paper, a variety of functional poly-para-xylylene films were inhibited deposition by applying current. The metal patterns of honeycomb were manufactured with process of nanosphere lithography, which removing the polystyrene by tetrahydrofurane(THF) after using the nanospheres of polystyrene as a mask to deposits the metal. After the device were finished, a power supply device was set as 0.1 A and different argon flow rate in the chemical vapor deposition(CVD) was applied to form the nanostructure pattern of functional poly-para-xylylene with the height of about 100nm. First, in order to verify the effect of the electrically-charged selectivity, we placed the substrate and the control group with no current applied during the deposition process. Then, the surface functional groups of the substrate and the control groups were analyzed by fourier transform infrared spectrometers(FTIR) to verify the effect of electrical deposition inhibition. In order to verify the prepared nanostructured polymers, we observed the surface morphology by scanning electron microscope(SEM) and atomic force microscope(AFM). In addition, the roughness was analyzed by AFM analysis software. The change of hydrophobicity of different functional groups of nanostructures on the surface was investigated with the contact angle meter. For exploring the functional groups presence of its surface pattern, the specific elemental analysis was performed by energy-dispersive X-ray spectroscopy(EDS) on SME. Finally, the specific functional group elements were determined. To verify the chemical reactivity of its functional groups, we used the Alexa Fluors 350 and FITC-RRCC to react with PPX-amine and PPX-TFA, respectively. The ultra-analytical multi-photon spectroscopy was used to capture the nanopattern fluorescence image. The technology of nano-structure by the bottom-up approaches successfully broke the restrictions of the clarity for mask and curved surface of material. Therefore, it is easy to form a functional nano-structure for any surface material in the future. For the properties of the material, the poly-para-xylene has good light transmittance and great utility to the perovskite solar cells. The use of nanostructures increases the contact area between PbI2 and MAI on titanium dioxide to enhance the conversion efficiency, thereby enhancing the efficiency of solar cell photoelectric conversion. A variety of functional poly-para-xylene can be prepared into a conductive polymer through a series of chemical reactions. It could be a potential candiadate material for flexible device for the solar cells.