Mechanical Properties and Oxidation Resistance of Zr–Si–N Coatings

碩士 === 國立臺灣海洋大學 === 材料工程研究所 === 105 === Zr–Si–N coatings were fabricated using reactive direct current magnetron cosputtering. The low–Si–content,Zr60N40 and Zr58Si2N40,exhibited a face–centered cubic (f.c.c.) structure, accompanied with nanohardness of 21.0–23.6 GPa and a Young’s modulus of 248–267...

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Bibliographic Details
Main Authors: Chang, Shan-Chun, 張善淳
Other Authors: Yung–I Chen
Format: Others
Language:zh-TW
Published: 2016
Online Access:http://ndltd.ncl.edu.tw/handle/2kj66n