Surface Acoustic Wave Array Coated by Various Polymers for Detecting Low Concentration Gas Mixture
碩士 === 國立清華大學 === 奈米工程與微系統研究所 === 105 === In this research, surface acoustic wave (SAW) is developed a highly sensitive electronic nose sensing system. 114 MHz SAW chips are fabricated by MEMS techniques in well design and processes; gold interdigital transducers are deposited on the 128° YX- LiNbO...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/pppgm4 |