Back-End Integrable On-Chip MIM Decoupling Capacitors Featuring High Capacitance with Low Leakage Current by Orthorhombic HfZrOx

Back-End Integrable On-Chip MIM Decoupling Capacitors Featuring High Capacitance with Low Leakage Current by Orthorhombic HfZrOx

碩士 === 國立清華大學 === 工程與系統科學系 === 105 === abstract hide

Bibliographic Details
Main Authors:	Chen, Teng-Chuan, 陳登荃
Other Authors:	Wu, Yung-Hsien
Format:	Others
Language:	zh-TW
Published:	2017
Online Access:	http://ndltd.ncl.edu.tw/handle/r9g6g8

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