Control Performance of Dynamic Quasi Minimum MSE Run-to-Run Controller
碩士 === 國立清華大學 === 統計學研究所 === 105 === Run-to-run (R2R) control plays a vital role in monitoring or adjusting the integrated-circuit (IC) manufacturing process. Recently, a dynamic quasi MMSE (qMMSE) controller has been proposed in literature to address R2R problem when the process dynamics and distur...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/mx75ku |