A Study on Safety Design of Copper Wet Etching Equipment in TFT-LCD Industry
碩士 === 國立高雄第一科技大學 === 環境與安全衛生工程系消防與防災工程碩士在職專班 === 105 === In response to the development of TFT-LCD towards large-size products and the improvement of high-resolution image, the aluminum target has been replaced by the Copper Wet Etching process, a new material to overcome the phenomenon of delay ge...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/19914604022142989655 |