A Study of Few-layer MoS2 Photoluminescence Using a Micro-spectroscopic System

• Main Authors: Cheng, Chang-Yu, 鄭長宇
• Other Authors: Chang, Yu-Chung
• Format: Others
• Language: zh-TW
• Published: 2017
• Online Access: http://ndltd.ncl.edu.tw/handle/yg56b9

碩士 === 國立彰化師範大學 === 電機工程學系 === 105 === In this thesis, a micro-PL system was used to measure the photoluminescence and Raman spectra of MoS2 thin film. In addition, the sample thickness was analyzed using the scanning imaging (mapping) function of the system by measuring the reflectance and photoluminescence simultaneously. The scanning imaging system has diffraction limited resolution, and enables small feature identification which is difficult for typical optical microscope. This system is also capable of laser thinning and micro-machining of the semiconductor thin films. The results show that the system has the sensitivity to measure the photoluminescence and Raman spectra of few-layer MoS2.The distinct optical properties of few-layerMoS2are observed with the system. When the number of sample layers decreases, the characteristic peak spacing of Raman spectra also reduces, which is identical to the reports in the literature.