Development of sinusoidal phase modulation grating interferometer for displacement measurement
碩士 === 國立中央大學 === 光機電工程研究所 === 105 === In this study, a high-precision displacement measurement system: sinusoidal phase modulation grating interferometer, is developed by integrating heterodyne grating interferometry and digital lock-in technique. In the 21st century, high-precision displacement me...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/39087176637048412987 |