Array filter for short wave infrared applications

• Main Authors: Po-Han Chen, 陳柏翰
• Other Authors: 陳昇暉
• Format: Others
• Language: zh-TW
• Published: 2017
• Online Access: http://ndltd.ncl.edu.tw/handle/s889g8

碩士 === 國立中央大學 === 光電科學與工程學系 === 105 === This paper aimed to design and fabricate an optical device with four narrow-band-pass filters arrange by using a mosaic array pattern of the different wavelength range in SWIR(Short Wave Infrared). When the filter were bundled on a SWIR image sensor of 640X512 in resolution pixels, the four images of the different wavelength can be analyzed at the same time for the application of military surveillance, seeing through foggy and smoggy environment and night vision. The central wavelengths of these four narrow-band-pass filters are 905nm, 950nm, 1055nm, and 1550nm, respectively. The fabrication of the filters were using a dual electric gun deposition system with ion assisted deposition after the lithography process. Repeating four times of lithography and deposition process and black matrix coating, the optical device processes were completed.