| Summary: | 博士 === 國立中央大學 === 機械工程學系 === 105 === The localized electrochemical deposition (LECD) process has been used to fabricate 3D microproducts. The purpose of this research is to develop a LECD process with a real-time 3D image feedback distance control system to improve the quality and conformational design complexity of 3D microproducts.
In 2D microstructure, the deposition direction of the microstructures is found to be closely related to the relative orientations and positions of the micro-anode and the microstructure stip. By controlling the anode position and orientation, microstructures with different geometries can be fabricated and their properties can be improved.
We also discussed the relationship between the deposition orientations of 2D microstructures and working voltage by experiment and electro field strength simulation. According to the experimental results, the deposition orientations don’t be significant changed when the experiments was applied with different working voltage in same microelectrode-structure distance.
For predicting the deposition orientation of 2D microstructures, we proposed three methods to analyze the distribution of electro field strength by using characteristic directions calculated from the maximum electric field strength, weighted average, and mid-point (over a certain threshold value) methods. Compared with the experimental results, the mid-point method with a 50% threshold value provides the best prediction for the deposition orientation.
For fabricated complex 3D microproducts, analyses of microproducts show that the main factor is the deposition direction angle that can be controlled in a 2D fabrication method. The deposition direction angle was the angle between the normal direction of the substrate surface and deposition direction. The normal direction of the substrate surface was determined 0"°" .We investigate two methods to improve the deposition direction angle in this study. The first method makes use of a new type of micro anode with asymmetric tip. By using this asymmetric micro anode, the deposition direction angle is found to range between −12.0° and 107.9°. This range is only to display the performance of the anode that proposed in this study. The second method is to redesign the moving mechanism and increase actuators and axes. By employing these two methods, we demonstrate high quality fabrication of two types of microstructures: helical springs with low pitch angle and inverted tripods.
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