The Study of Nanopatterned Fluorine doped Tin Oxide Glass Substrates Applied on Perovskite Solar Cells

• Main Authors: Bo-Chiau Huang, 黃柏樵
• Other Authors: 詹佳樺
• Format: Others
• Language: zh-TW
• Published: 2017
• Online Access: http://ndltd.ncl.edu.tw/handle/88799475124238016153

碩士 === 國立中央大學 === 機械工程學系 === 105 === In this study, we applied nanopattened fluorine doped tin oxide (FTO) glass substrates to perovskite solar cells. In order to improve current density of cells by increasing of the surface area of cathode and the light harvesting by active layer. We used Rsoft optical simulation software to simulate our cells with nanopatterened FTO substrates. As the results, the light absorption of the cells using nanopatterned FTO substrates are higher than the cells using planar FTO substrates in the most range of wavelength. The method of fabricating nanopattened FTO substrates, first, was coating the FTO electrodes with photoresist, then arrayed monolayer SiO2 nano-spheres on the photoresist. After that, nanopatterns were created on photoresist by photolithography. In the end, transferring the nanopattern from photoresist to FTO by inductively coupled plasma (ICP) etching. We calculated the increasing of surface area when using nanopattened FTO substrates. The deeper etching depth are, the more increasing are. A 93.74% increasing of surface area was obtained by using 200nm-etching-depthed FTO substrate. The cell with planar FTO substrates as reference had Jsc of 19.27 mA/cm2 and PCE of 14.21%. The cell with 200nm-etching-depthed FTO substrate raised its Jsc to 21.72 mA/cm2. We further optimize the thickness of the meso layer on the patterned FTO substrates and the result showed the highest Jsc of 23.81 mA/cm2 and PCE of 17.85%, a 25.62% improvement of PCE was obtained.