Low resistance and high visible transmittance of transition metal oxide/silver composites through physical vapor deposition

• Main Authors: Tzu-wei Lin, 林自威
• Other Authors: Sheng-Wei Lee
• Format: Others
• Language: en_US
• Published: 2017
• Online Access: http://ndltd.ncl.edu.tw/handle/dx5rbn

博士 === 國立中央大學 === 材料科學與工程研究所 === 105 === The MoOx layers with amorphous phases fabricated by reactive sputtering with plasma at an O2/Ar of 6% for the reactive gas exhibited a high visible transmittance and a large optical band gap of 2.7 eV. For the A(10)M bilayer, an appropriate O2/Ar plasma can improve the transparency and reduce the IR transmittance. With an embedded Ag layer > 10 nm, the MAM sandwiched layers exhibit superior conductivity with sufficiently high visible and low NIR transmittance. The inserted 10-nm Ag layer can effectively reduce the resistance of the MAM stacked layer down to 4.83 Ω/sq, and the FOM of MA(10)M at a visible wavelength of 550 nm can reach 5.310-2. The optical and electrical properties of the MoOx layer are a function of the thickness of the MoOx dielectric layer. Our results suggest that a MoOx multilayer with appropriate Ag and MoOx thicknesses is a promising candidate for application as a TCO and heat mirror. The Ag layer was exposed to plasma induced by an in-situ 6% O2/Ar mixture, and this approach was demonstrated to tune the visible transmittance of MAM effectively without degradation of the Rs. Such a MoOx/Ag/MoOx stacked structure might be a promising electrode in potential applications of transparent conductive oxides on conventional glass or flexible substrate. The ITO layers and ITO/Ag multi-layers with amorphous phases fabricated by reactive sputtering with plasma through O2/Ar mixture of 1% severed as the reactive gas exhibited high visible transmittance and a large optical band gap of 3.62 eV. In the IAI multilayer, the interface between the Ag and ITO layer revealed by HRTEM shows a distinct boundary. With an embedded Ag layer > 10 nm, the as-prepared IAI sandwiched layers exhibit superior conductivity with high visible transmittance at the wavelength of 550 and 600 nm. The inserted 10-nm Ag layer can effectively reduce the resistance of the I(60)A(10)I(60) stacked layer down to 5.8 Ω/sq, and the FOM of IA(10)I at a visible wavelength of 550 and 600 nm can reach up to ~ 1.09×10-1 and 1.28×10-1. The visible transmittance of symmetric IAI sample shows a blue-shift with a decreasing in the ITO thicknesses. The Rs of IAI sample reduced as an increasing RTA temperature < 400 oC. The transmittance without degradation in the annealed samples > 400 oC also showed blue-shift, which is attributed to the crystallization of ITO layer after RTA. The FOM of IA(10)I at a visible wavelength of 550 nm can reach up to ~ 1.56×10-1-1 after annealing treatment at 400 oC. Our results suggest that a ITO multilayer with appropriate Ag and ITO thicknesses is a promising electrode candidate for application as a TCO and blue light emitting diode. The crystallinity, microstructure, and electrical and optical properties of TAW and WAW multilayers on PES or glass through E-beam evaporation at room temperature were studied. The polycrystalline Ag layer with preferred orientation along the (111) plane in the TAW stacked layers were observed. In the asymmetrical TAW multilayer as revealed by HRTEM, both of the interface between the Ag/TiOx capping layer and Ag/WO3 BL show distinct boundaries and no oxide formation. With an embedded Ag layer > 15 nm, the T(40)A(15)W(40) sandwiched layers exhibit superior conductivity with sufficiently high visible (> 93.7%) at the wavelength of 550 nm and low NIR transmittance (14.4%). The inserted 15-nm Ag layer can effectively reduce the resistance of the TAW stacked layer down to 3.93 Ω/sq, and the highest FOM of the optimal TA(15)W at a visible wavelength of 550 nm can reach as high as 1.210-1 -1, which is higher than the value of the previous report [2, 19-22]. The TAW layer also shows better moisture stability than that of the WAW sandwiched layer owing to the suppression of moisture by the TiOx top layer. Our results suggest that an asymmetrical TA(15)W multilayer is a promising candidate for application as a robust TCO and heat mirror on flexible substrate.