Aluminum Doped Zinc Oxide Transparent Conductive Oxide Thin Film Deposited by Arc Ion Plating System
碩士 === 國立交通大學 === 平面顯示技術碩士學位學程 === 105 === The project aims to analysis the properties of Transparent Conducting Oxide thin film of Al doped ZnO (AZO) deposited on glass、silicon wafer and PET substrates though controlling various parameters including alloy target with 2% and 3% Al-Zn and oxygen flow...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/kmzc4r |