Characteristics of Tip-based Extended Gate Field Effect Transistors as Biosensors
碩士 === 國立交通大學 === 生醫工程研究所 === 105 === In this thesis, tip-based extended gate field effect transistor is studied as the biosensor. Atomic layer deposition (ALD) was adopted to grow ultra-thin aluminum oxide (Al2O3) film to cover the 0.5 mm aluminum wires with high conformality at 250 C. After...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/46722917367819763300 |