| Summary: | 碩士 === 國立交通大學 === 機械工程系所 === 105 === This thesis introduces the practical issue of two-photon polymerization platform via utilization of the photoresist to fabricate two-dimensional or three-dimensional structures. The feasibility of accelerated polymerization by using laser-scanning system is discussed.
The whole system is divided into the optical and microscopy system. Titanium sapphire femtosecond laser, centered at 800 nm, is used as the light source in the optical system. A half wave plate and polarizer are used to control the power. The pulse duration is compressed to be ~ 95 femtosecond in front of the sample. The switch of the light source is achieved by an acousto-optic modulator. The microscopy system includes an inverted microscope, incorporated with a galvanometer mirrors for two-dimensional laser scanning. The depth dimension of the structure is controlled by a motorized stage and monitored with a confocal system.
By controlling the laser power and writing speed, this two-photon polymerization platform is capable of writing the structures on the sample (photoresist on substrate) with different resolution (linewidth). The resolution of the polymerized structure can be achieved by suitable light dosage, which just exceeds the threshold of polymerization. The optimal resolution (minimum linewidth) achieved in this thesis is 190 nm.
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