Development of Low Temperature Cu Bonding and Heterogeneous Integration Platform

博士 === 國立交通大學 === 電子研究所 === 105 === This dissertation focuses on researches of three-dimensional integrated circuit, including development of key technologies and using technologies for the construction of heterogeneous integration platform. Studies focus on the physical mechanism of bonding technol...

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Bibliographic Details
Main Authors: Huang, Yan-Pin, 黃彥斌
Other Authors: Chen, Kuan-Neng
Format: Others
Language:en_US
Published: 2017
Online Access:http://ndltd.ncl.edu.tw/handle/y2b7ft