A Study on Key Process Technologies of 4H Silicon Carbide Trench Gate Power MOSFETs

博士 === 國立交通大學 === 電子研究所 === 105 === As the growing demand for power saving and carbon reduction, wide bandgap semiconductor materials are vastly discussed to be the next-generation power device. With a general reduction in power loss, devices made of wide bandgap semiconductor surpass Si power devic...

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Bibliographic Details
Main Authors: Tseng, Yuan-Hung, 曾元宏
Other Authors: Tsui, Bing-Yue
Format: Others
Language:en_US
Published: 2017
Online Access:http://ndltd.ncl.edu.tw/handle/75242979286958189512

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