Transformation of Titanium Dioxide to Epitaxial Titanium Nitride by Microwave Plasma Nitriding
碩士 === 國立交通大學 === 材料科學與工程學系所 === 105 === This thesis focuses on the study of nitriding process on different TiO2 templates by using microwave plasma. One of the templates is a 50 nm thick amorphous TiO2 film coated by atomic layer deposition on Si (100), and the other is single crystalline TiO2 of r...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/xzj9hm |