Reduction of Acid Gas Pollution in The Chemical Supply Area of A Semiconductor Factory
碩士 === 國立交通大學 === 工學院永續環境科技學程 === 105 === The clean room standard was controlled by the number of particles; it is controlled by the concentration of Airborne Molecular Contaminations (AMCs) due to the advanced semiconductor wafer manufacturing process. Therefore, it is critical for the semiconducto...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/v575u3 |