A Study on Monitoring and Cleaning Strategies of Filtration-Film Clogging in Fluid Circulation System: for Acid-Tank Application in Semiconductor Manufacturing

A Study on Monitoring and Cleaning Strategies of Filtration-Film Clogging in Fluid Circulation System: for Acid-Tank Application in Semiconductor Manufacturing

碩士 === 國立成功大學 === 機械工程學系 === 105

Bibliographic Details
Main Authors: Ting-HsiangChai, 翟挺翔
Other Authors: Tian-Shiang Yang
Format: Others
Language:zh-TW
Published: 2017
Online Access:http://ndltd.ncl.edu.tw/handle/krjdta
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spelling ndltd-TW-105NCKU54890492019-05-15T23:47:01Z http://ndltd.ncl.edu.tw/handle/krjdta A Study on Monitoring and Cleaning Strategies of Filtration-Film Clogging in Fluid Circulation System: for Acid-Tank Application in Semiconductor Manufacturing 流體循環系統濾心阻塞與清洗策略研究：以半導體酸槽製程為應用標的 Ting-HsiangChai 翟挺翔 碩士 國立成功大學 機械工程學系 105 Tian-Shiang Yang Kuo-Shen Chen 楊天祥 陳國聲 2017 學位論文 ; thesis 110 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立成功大學 === 機械工程學系 === 105
author2 Tian-Shiang Yang
author_facet Tian-Shiang Yang
Ting-HsiangChai
翟挺翔
author Ting-HsiangChai
翟挺翔
spellingShingle Ting-HsiangChai
翟挺翔
A Study on Monitoring and Cleaning Strategies of Filtration-Film Clogging in Fluid Circulation System: for Acid-Tank Application in Semiconductor Manufacturing
author_sort Ting-HsiangChai
title A Study on Monitoring and Cleaning Strategies of Filtration-Film Clogging in Fluid Circulation System: for Acid-Tank Application in Semiconductor Manufacturing
title_short A Study on Monitoring and Cleaning Strategies of Filtration-Film Clogging in Fluid Circulation System: for Acid-Tank Application in Semiconductor Manufacturing
title_full A Study on Monitoring and Cleaning Strategies of Filtration-Film Clogging in Fluid Circulation System: for Acid-Tank Application in Semiconductor Manufacturing
title_fullStr A Study on Monitoring and Cleaning Strategies of Filtration-Film Clogging in Fluid Circulation System: for Acid-Tank Application in Semiconductor Manufacturing
title_full_unstemmed A Study on Monitoring and Cleaning Strategies of Filtration-Film Clogging in Fluid Circulation System: for Acid-Tank Application in Semiconductor Manufacturing
title_sort study on monitoring and cleaning strategies of filtration-film clogging in fluid circulation system: for acid-tank application in semiconductor manufacturing
publishDate 2017
url http://ndltd.ncl.edu.tw/handle/krjdta
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AT dítǐngxiáng astudyonmonitoringandcleaningstrategiesoffiltrationfilmclogginginfluidcirculationsystemforacidtankapplicationinsemiconductormanufacturing
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AT dítǐngxiáng studyonmonitoringandcleaningstrategiesoffiltrationfilmclogginginfluidcirculationsystemforacidtankapplicationinsemiconductormanufacturing
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