A framework to analyze in-line measurements for yield enhancement in wafer fabrication

A framework to analyze in-line measurements for yield enhancement in wafer fabrication

碩士 === 國立成功大學 === 統計學系 === 105

Bibliographic Details
Main Authors: Chia-HuaTsai, 蔡家華
Other Authors: Shuen-Lin Jeng
Format: Others
Language:en_US
Published: 2017
Online Access:http://ndltd.ncl.edu.tw/handle/kkh3j7
id ndltd-TW-105NCKU5337016
record_format oai_dc
spelling ndltd-TW-105NCKU53370162019-05-15T23:47:01Z http://ndltd.ncl.edu.tw/handle/kkh3j7 A framework to analyze in-line measurements for yield enhancement in wafer fabrication 晶圓良率分析之Inline 量測資料分析 Chia-HuaTsai 蔡家華 碩士 國立成功大學 統計學系 105 Shuen-Lin Jeng 鄭順林 2017 學位論文 ; thesis 51 en_US
collection NDLTD
language en_US
format Others
sources NDLTD
description 碩士 === 國立成功大學 === 統計學系 === 105
author2 Shuen-Lin Jeng
author_facet Shuen-Lin Jeng
Chia-HuaTsai
蔡家華
author Chia-HuaTsai
蔡家華
spellingShingle Chia-HuaTsai
蔡家華
A framework to analyze in-line measurements for yield enhancement in wafer fabrication
author_sort Chia-HuaTsai
title A framework to analyze in-line measurements for yield enhancement in wafer fabrication
title_short A framework to analyze in-line measurements for yield enhancement in wafer fabrication
title_full A framework to analyze in-line measurements for yield enhancement in wafer fabrication
title_fullStr A framework to analyze in-line measurements for yield enhancement in wafer fabrication
title_full_unstemmed A framework to analyze in-line measurements for yield enhancement in wafer fabrication
title_sort framework to analyze in-line measurements for yield enhancement in wafer fabrication
publishDate 2017
url http://ndltd.ncl.edu.tw/handle/kkh3j7
work_keys_str_mv AT chiahuatsai aframeworktoanalyzeinlinemeasurementsforyieldenhancementinwaferfabrication
AT càijiāhuá aframeworktoanalyzeinlinemeasurementsforyieldenhancementinwaferfabrication
AT chiahuatsai jīngyuánliánglǜfēnxīzhīinlineliàngcèzīliàofēnxī
AT càijiāhuá jīngyuánliánglǜfēnxīzhīinlineliàngcèzīliàofēnxī
AT chiahuatsai frameworktoanalyzeinlinemeasurementsforyieldenhancementinwaferfabrication
AT càijiāhuá frameworktoanalyzeinlinemeasurementsforyieldenhancementinwaferfabrication
_version_ 1719154660005117952

Similar Items