Stability Analysis and Robust Optimal Design of Run-to-Run Control Subject to Metrology Delays

Stability Analysis and Robust Optimal Design of Run-to-Run Control Subject to Metrology Delays

碩士 === 國立成功大學 === 化學工程學系 === 105

Bibliographic Details
Main Authors:	Jui-ChiLin, 林瑞麒
Other Authors:	Shyh-Hong Hwang
Format:	Others
Language:	zh-TW
Published:	2017
Online Access:	http://ndltd.ncl.edu.tw/handle/tfzn7p

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