Design and Fabrication of Photodetector based on transistor
碩士 === 國立中興大學 === 機械工程學系所 === 105 === This study designs and implements a photodetector of transistor type in the standard 0.18 μm complementary metal oxide semiconductor (CMOS) micro electro mechanical system (MEMS) process. The P-type and N-type doping patterns provided by the standard CMOS-MEMS p...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2017
|
Online Access: | http://ndltd.ncl.edu.tw/handle/70953790372560649431 |