Design and Fabrication of Photodetector based on transistor

碩士 === 國立中興大學 === 機械工程學系所 === 105 === This study designs and implements a photodetector of transistor type in the standard 0.18 μm complementary metal oxide semiconductor (CMOS) micro electro mechanical system (MEMS) process. The P-type and N-type doping patterns provided by the standard CMOS-MEMS p...

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Bibliographic Details
Main Authors: Guo-Rong Chen, 陳國榕
Other Authors: 戴慶良
Format: Others
Language:zh-TW
Published: 2017
Online Access:http://ndltd.ncl.edu.tw/handle/70953790372560649431