Fabrication of Thermoelectric Micro Generators with Carbon Nanocapsules

• Main Authors: Yu-Wei Chen, 陳佑維
• Other Authors: 戴慶良
• Format: Others
• Language: zh-TW
• Published: 2017
• Online Access: http://ndltd.ncl.edu.tw/handle/69785822575083200401

碩士 === 國立中興大學 === 機械工程學系所 === 105 === In this study, we present a thermoelectric microgenerator fabricated using the standard 0.18 μm CMOS (complementary metal oxide semiconductor) process are investigated. The thermoelectric microgenerator consists of 129 thermocouples in series, and the thermocouples are composed of p-type and n-type polysilicons. The output power of microgenerator relies on the temperature difference between the hot and cold parts of thermocouples. To increase the temperature difference of thermocouples, the hot part of thermocouples is designed as the suspended structure. Then, the hot part of the thermocouples is coated by CNCs (Carbon nanocapsules) that increasing absorb radiant heat source. The cold part of thermocouples is formed on the silicon substrate, and covered by silicon oxide that provides low thermal conductivity and thermal isolation. The FEM (finite element method) software of ANSYS Workbench is employed to simulate the temperature distribution and temperature difference of the thermoelectric microgenerator, and analyzed the optimal geometry of the thermocouples. The experimental results showed that the output voltage and output power of the microgenerator without CNCs film were 4.426 mV, and 224.65 pW, respectively, at the temperature difference of 3.6 K. The output voltage and output power of the microgenerator with CNCs film were 5.845 mV and 391.789 pW, respectively, at the temperature difference of 4.3 K. The microgenerator had the voltage factor of 0.882 mV/k/mm2 and the power factor of 13.686 pW/K2/mm2.