Growth of aluminum gallium oxide films for deep-ultraviolet detector applications
碩士 === 國立中興大學 === 材料科學與工程學系所 === 105 === This thesis describes the growth and characterization of (AlxGa1-x)2O3 thin films on c-plane sapphire substrates by pulsed laser deposition (PLD). The photodetectors based on these samples were fabricated to evaluate their deep ultraviolet response. It is wel...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/36223127331504820771 |